Koordinatenmessmaschine und Koordinatenkorrekturverfahren

Details

Veröffentlichungs-Nr.

EP3287739

Aktenzeichen

EP17187463

Anmeldetag

23. August 2017

Veröffentlichung

16. September 2020

Erteilung

16. September 2020

Rechtsraum

EP

IPC

G01B21/04G01B5/008

Abstract

A processing device(400) includes: a coordinate acquisition unit (406) that acquires a moving amount M of a measuring probe (300) and a probe output P when the measuring probe (300) is moved by a drive mechanism(220) while restraining a measurement tip(306) by restraining unit (240) ; a matrix generation unit (408) that generates a correction matrix AA including linear correction elements and non-linear correction elements for respectively correcting linear coordinate components and non-linear coordinate components of the probe output P with respect to the moving amount M of the measuring probe (300) on the basis of an output of the coordinate acquisition unit(406); and a probe output correction unit(410) that corrects the probe output P with the correction matrix AA. The coordinate acquisition unit(406) acquires the moving amount M and the probe output P of the measuring probe (300) in each of measurement points in a quantity larger than or equal to the sum of the number of the linear correction elements and the number of the non-linear correction elements. Consequently, a non-linear error of the probe output P supplied from the measuring probe (300) can be corrected, and thus shape coordinates X of an object W to be measured can be obtained with high accuracy.

Anmelder

Firma

Mitutoyo Corporation

Land

🇯🇵 Japan

Fachgebiete