Mems-Sensor

Details

Veröffentlichungs-Nr.

EP3331160

Aktenzeichen

EP16201746

Anmeldetag

1. Dezember 2016

Veröffentlichung

28. April 2021

Erteilung

28. April 2021

Rechtsraum

EP

IPC

H03F1/26H03F1/34H03F3/181H03F3/45H03F3/70

Abstract

A MEMS sensor (1) comprises a MEMS transducer (10) being coupled to a MEMS interface circuit (20). The MEMS interface circuit (20) comprises a bias voltage generator (100), a differential amplifier (200), a capacitor (300) and a feedback control circuit (400). The bias voltage generator (100) generates a bias voltage (Vbias) for operating the MEMS transducer. The variable capacitor (300) is connected to one of the input nodes (1200a) of the differential amplifier (200). At least one of the output nodes (A200a, A200b) of the differential amplifier is coupled to a base terminal (T110) of an output filter (110) of the bias voltage generator (100). Any disturbing signal from the bias voltage generator (100) is a common-mode signal that is divided equally on the input nodes (1200a, 1200b) of the differential amplifier (200) and is therefore rejected.

Anmelder

Firma

ams International AG

Land

🇨🇭 Schweiz

Fachgebiete