Vorrichtung und Verfahren zur Holographischen In-Line-Bildgebung
Anmelder: IMEC vzw 🇧🇪
Details
- Veröffentlichungs-Nr.
- EP3339963
- Aktenzeichen
- EP16205862
- Anmeldetag
- 21. Dezember 2016
- Veröffentlichung
- 12. August 2020
- Erteilung
- 12. August 2020
- Rechtsraum
- EP
- IPC
- G03H1/00// G03H1/04
Abstract
An apparatus for in-line holographic imaging is provided. The apparatus (100) comprises at least a first light source (102) and a second light source (104) arranged for illuminating an object (108) arranged in the apparatus (100) with a light beam; an image sensor (110) being arranged to detect at least a first and a second interference pattern, wherein the first interference pattern is formed when the object (108) is illuminated by the first light source (102) and the second interference pattern is formed when the object (108) is illuminated by the second light source (104), wherein the first and second interference patterns are formed by diffracted light, being scattered by the object (108), and undiffracted light of the light beam; wherein the at least first and second light sources (102, 104) are arranged at different angles in relation to the object (108), and possibly illuminate the object (108) using different wavelengths.
Anmelder
- Firma
- IMEC vzw
- Land
- 🇧🇪 Belgien
Imec ist ein belgisches Forschungszentrum mit Sitz in Leuven, das auf Nanoelektronik, Halbleitertechnologie und digitale Technologien spezialisiert ist.
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