Kanonenlinsendesign in einem Ladungsträgerteilchenmikroskop

Details

Veröffentlichungs-Nr.

EP3399537

Aktenzeichen

EP18170249

Anmeldetag

1. Mai 2018

Veröffentlichung

16. Oktober 2019

Erteilung

16. Oktober 2019

Rechtsraum

EP

IPC

H01J37/065H01J37/067H01J37/145// H01J37/28

Abstract

A charged particle microscope comprising: - A vacuum enclosure (2) ; - A source (4) for producing a beam of charged particles; - A specimen holder (H) for holding a specimen; - An illuminator, provided between said source and specimen holder, and comprising in a propagation direction of said beam: ª A source lens (8a, 8b); ª A condenser system (10); - A detector (22) for detecting radiation emanating from the specimen in response to irradiation by said beam, wherein said source lens is a compound lens, comprising in said propagation direction: - A magnetic lens (8a) comprising permanent magnets (16) disposed outside said vacuum enclosure but produce a magnetic field within it; - A variable electrostatic lens (8b).

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete