Durchflusssensor mit Thermoelementen

Details

Veröffentlichungs-Nr.

EP3404373

Aktenzeichen

EP17171523

Anmeldetag

17. Mai 2017

Veröffentlichung

4. März 2020

Erteilung

4. März 2020

Rechtsraum

EP

IPC

G01F1/684G01F1/688G01F1/696

Abstract

A device for measuring the flow of a fluid comprises a substrate (1) and a heater (4) arranged on the substrate (1). At least one first and at least one second sensing thermocouple (5,6) are arranged on the substrate (1) on opposite sides of the heater (4) for generating a sensing signal (”T) proportional to a temperature difference between a location upstream and downstream from the heater (4), wherein a junction (51,61) of the sensing thermocouples (5,6) closest to the heater (4) is arranged at a first distance (d1) from the heater (4). At least a first and a second monitoring thermocouple (9,10) are arranged on the substrate (1) on opposite sides of the heater (4) in parallel to the sensing thermocouples (5,6) for generating a monitoring signal (TP), wherein a junction (91,101) of the monitoring thermocouples (9,10) closest to the heater (4) is arranged at a second distance (d2) from the heater (4), wherein the second distance (d2) is equal to or more than the first distance (d1). A control circuit (18) is adapted to measure a flow of the fluid over the heater (4) and the sensing thermocouple (5,6) subject to the sensing signal (”T) and the monitoring signal (TP).

Anmelder

Firma

Sensirion AG

Land

🇨🇭 Schweiz

Fachgebiete