Piezoelektrisches Element und Vorrichtung mit Angebrachtem Piezoelektrischem Element

Details

Veröffentlichungs-Nr.

EP3413362

Aktenzeichen

EP18176489

Anmeldetag

7. Juni 2018

Veröffentlichung

16. Oktober 2019

Erteilung

16. Oktober 2019

Rechtsraum

EP

IPC

H01L41/08H01L41/187B41J2/14

Abstract

A piezoelectric element includes a first electrode, a second electrode, a piezoelectric layer which is provided between the first electrode and the second electrode, and is formed of a perovskite type oxide including at least one selected from the group consisting of potassium, sodium, bismuth, and niobium, a first perovskite layer which is provided between the piezoelectric layer and the first electrode, and is formed of a perovskite type oxide having a composition different from that of the piezoelectric layer, and a second perovskite layer which is provided between the piezoelectric layer and the second electrode, and is formed of a perovskite type oxide having a composition different from that of the piezoelectric layer.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan

Fachgebiete