Tastkopf für Koordinatenmessgerät, der ein Photolumineszenzmaterial zur Überwachung der Tasterverschiebung Verwendet

Details

Veröffentlichungs-Nr.

EP3415862

Aktenzeichen

EP18178083

Anmeldetag

15. Juni 2018

Veröffentlichung

2. März 2022

Erteilung

2. März 2022

Rechtsraum

EP

IPC

G01B5/012G01B11/00

Abstract

A scanning probe responsive in three axes is provided for use in a coordinate measuring machine. The scanning probe includes a frame, a stylus suspension portion and a stylus position detection portion. The stylus position detection portion includes a light source that is operated to radiate source light toward a position indicating element that is fixed relative to the stylus coupling portion. The position indicating element includes a position indicating emitter having an emitter material (e.g., phosphor) that inputs and absorbs the light from the light source and responds by outputting excitation light. In various implementations, the excitation light is directed as at least one of axial measurement light along an axial measurement spot path to form an axial measurement spot on an axial position sensitive detector and/or rotary measurement light along a rotary measurement spot path to form a rotary measurement spot on a rotary position sensitive detector.

Anmelder

Firma

Mitutoyo Corporation

Land

🇯🇵 Japan

Fachgebiete