Piezoelektrische Vorrichtung, Flüssigkeitsausstosskopf und Flüssigkeitsausstossvorrichtung

Details

Veröffentlichungs-Nr.

EP3424719

Aktenzeichen

EP18182035

Anmeldetag

5. Juli 2018

Veröffentlichung

14. April 2021

Erteilung

14. April 2021

Rechtsraum

EP

IPC

B41J2/14B41J2/055

Abstract

A piezoelectric device used in a liquid ejecting head that ejects a liquid from a nozzle includes a flow-path-forming substrate in which an individual liquid chamber that communicates with the nozzle and a liquid supply chamber that communicates with the individual liquid chamber are formed, a vibration plate formed at a position corresponding to the individual liquid chamber and the liquid supply chamber of the flow-path-forming substrate, a plurality of liquid supply ports formed in the liquid supply chamber, and a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode, the piezoelectric element being formed at a position on the vibration plate corresponding to the individual liquid chamber, where the liquid supply ports are provided so as to penetrate the vibration plate, and where the vibration plate contains zirconium oxide.

Anmelder

Firma

Seiko Epson Corporation

Land

🇯🇵 Japan

Fachgebiete