Filmdicken-Messverfahren und Filmdicken-Messvorrichtung
Anmelder: TOYOTA JIDOSHA KABUSHIKI KAISHA 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP3428572
- Aktenzeichen
- EP18182751
- Anmeldetag
- 10. Juli 2018
- Veröffentlichung
- 20. Mai 2020
- Erteilung
- 20. Mai 2020
- Rechtsraum
- EP
- IPC
- G01B11/06// B24B37/013
Abstract
A signal waveform of an estimation signal and a signal waveform of the reflected light intensity signal are coordinated with each other such that a time point when a film thickness is equal to zero in the signal waveform of the estimation signal and a base point in the signal waveform of the reflected light intensity signal coincide with each other. A film thickness corresponding to that estimated value of a signal intensity of a reflected light which corresponds to a film thickness range corresponding to a time range in the signal waveform of the estimation signal and coincides with the signal intensity of the reflected light at a desired time point is set as a film thickness of a thin film (2) at the desired time point.
Anmelder
- Firma
- TOYOTA JIDOSHA KABUSHIKI KAISHA
- Land
- 🇯🇵 Japan
Japanischer Automobilhersteller mit Sitz in Toyota City, gegründet 1937. Entwickelt und produziert Pkw, Nutzfahrzeuge, Hybrid- und Wasserstoffantriebe sowie zugehörige Fahrzeugtechnologien.
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J A Kemp LLP
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J A Kemp
J A Kemp · London