Vorrichtung zur Optischen Messung und Verfahren zur Herstellung einer Vorrichtung zur Optischen Messung

Details

Veröffentlichungs-Nr.

EP3462148

Aktenzeichen

EP17193871

Anmeldetag

28. September 2017

Veröffentlichung

6. September 2023

Erteilung

6. September 2023

Rechtsraum

EP

IPC

G01J3/26G01J3/51G01J3/36G01J3/28H01L27/144

Abstract

An optical sensing device (10) comprises a photodetector array (11) comprising at least one first photodetector (12) and at least one second photodetector (13), the photodetector array (11) being arranged on a semiconductor substrate (14). The optical sensing device (10) further comprises a filter stack (15) arranged on the substrate (14) and covering the photodetector array (11). The filter stack (15) comprises at least two first lower dielectric mirrors (16) and at least two second lower dielectric mirrors (17), where a first and a second lower mirror (16, 17) are arranged above the first photodetector (12) and a first and a second lower mirror (16, 17) are arranged above the second photodetector (13), and where the first lower mirrors (16) have a different thickness in vertical direction (z) which is perpendicular to the main plane of extension of the substrate (14) than the second lower mirrors (17). The filter stack (15) further comprises a spacer stack (18) arranged on the first and second lower mirrors (16, 17), and an upper dielectric mirror (19) arranged on the spacer stack (18) and covering the photodetector array (11). Furthermore, a method for manufacturing an optical sensing device (10) is provided.

Anmelder

Firma

ams AG

Land

🇦🇹 Österreich

Fachgebiete