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Details

Veröffentlichungs-Nr.

EP3534391

Aktenzeichen

EP18159393

Anmeldetag

1. März 2018

Veröffentlichung

4. November 2020

Erteilung

4. November 2020

Rechtsraum

EP

IPC

H01J37/244H01J37/28G01N23/02

Abstract

A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps:- Providing the specimen on a specimen holder;- Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the specimen;- Providing a segmented detector for detecting a flux of charged particles traversing the specimen, which flux forms a beam footprint on said detector;- Causing said beam to scan across a surface of the specimen, combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield an imaging vector field;- Mathematically processing said imaging vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image of the specimen,specifically comprising:- Using a confined sub-region of said beam footprint to produce said vector output, and the attendant imaging vector field and integrated vector field image.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete