Piezoelektrisches Laminat, Verfahren zur Herstellung des Piezoelektrischen Laminats und Piezoelektrisches Element

Details

Veröffentlichungs-Nr.

EP3540797

Aktenzeichen

EP19162226

Anmeldetag

12. März 2019

Veröffentlichung

14. Juli 2021

Erteilung

14. Juli 2021

Rechtsraum

EP

IPC

H01L41/08H01L41/187

Abstract

There is provided a piezoelectric laminate, including: a substrate; and a piezoelectric film formed on the substrate, wherein the piezoelectric film contains an alkali niobium oxide represented by a composition formula of (K<1-x>Na<x>)NbO<3> (0<x<1), having a perovskite structure, and contains a metallic element selected from a group consisting of Cu and Mn at a concentration of more than 0.6 at% and 2.0 at% or less.

Anmelder

Firmen

Sumitomo Chemical Company, Limited
Sumitomo Chemical Company, Ltd
Sciocs Company Limited

Land

🇯🇵 Japan

Fachgebiete