Untersuchung Dynamischer Proben in einem Transmissionsteilchenmikroskop

Details

Veröffentlichungs-Nr.

EP3550585

Aktenzeichen

EP18165886

Anmeldetag

5. April 2018

Veröffentlichung

23. Juni 2021

Erteilung

23. Juni 2021

Rechtsraum

EP

IPC

H01J37/28H01J37/244H01J37/04

Abstract

A method of examining a dynamic specimen using a Transmission Charged Particle Microscope comprising: - A source, for producing a beam of charged particles; - A specimen holder, for holding the specimen in a specimen plane; - An illumination system, for directing said beam onto the specimen; - An imaging system, for directing charged particles that are transmitted through the specimen onto a detector in a detector plane, specifically comprising: - Sparsifying said beam so as to produce at detector level an image comprising a distribution of sub-images that are mutually isolated from one another at least along an elected scan path; - Using a scanning assembly to cause relative motion of said image and said detector along said scan path during a time interval Δt, so as to smear out each sub-image into a detection streak on said detector, each such streak capturing temporal evolution of its associated sub-image during said time interval Δt.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete