Verfahren zur Übertragung von Strukturen

Details

Veröffentlichungs-Nr.

EP3595007

Aktenzeichen

EP19184339

Anmeldetag

4. Juli 2019

Veröffentlichung

30. Dezember 2020

Erteilung

30. Dezember 2020

Rechtsraum

EP

IPC

H01L33/62H01L25/075H01L25/00H01L23/00H01L51/56H01L21/683H01L51/00

Abstract

The invention relates to a transfer method which comprises the steps a) providing a support layer (100) comprising a first face, structures (200) being assembled by their front face on the first face (110); c) a step of transferring the structures (200) onto a receiving face of a receiving substrate, the support layer (100) comprises folding regions (101), between the structures (200), adapted to pass from a folded state to an unfolded state under the action of an external excitation, the method comprises, between steps a) and c), a step b) of executing the external action so as to pass the folding regions from the folded state to the unfolded state such that the spacing of the structures (200) varies.

Anmelder

Firma

Commissariat à l'énergie atomique et aux énergies alternatives

Land

🇫🇷 Frankreich

Fachgebiete