Spektralsensor zur Multispektralen Bildgebung

Details

Veröffentlichungs-Nr.

EP3633334

Aktenzeichen

EP18198547

Anmeldetag

4. Oktober 2018

Veröffentlichung

28. Dezember 2022

Erteilung

28. Dezember 2022

Rechtsraum

EP

IPC

G01J3/28G01J3/26

Abstract

The present disclosure relates to a spectral sensor for acquiring spectral information of an object. The spectral sensor comprises an array of photo-sensitive areas forming pixels, a first type of interference filter comprising at least two reflective multilayers of a first type, wherein the multilayers are separated by an intermediate layer configured to give a constructive interference for a wavelength in a first wavelength range and a second type of interference filter comprising at least two reflective multilayers of a second type, wherein the multilayers are separated by an intermediate layer configured to give a constructive interference for a wavelength in a second wavelength range other than the first wavelength range. The sensor further comprises a first type of filter stack configured to selectively transmit light in the first wavelength range to a first photo-sensitive area and comprising the first type of interference filter and a second type of dielectric mirror, wherein the second type of dielectric mirror is reflective in the second wavelength range and comprises at least two reflective multilayers of the second type separated by an intermediate layer configured to give a destructive interference for a wavelength in the second wavelength range. The sensor further comprises a second type of filter stack configured to selectively transmit light in the second wavelength range to a second photo-sensitive area and comprising the second type of interference filter and a first type of dielectric mirror, wherein the first type of dielectric mirror is reflective in the first wavelength range and comprises at least two multilayers of the first type separated by an intermediate layer configured to give a destructive interference for a wavelength in the first wavelength range

Anmelder

Firma

IMEC vzw

Land

🇧🇪 Belgien

Fachgebiete