Filmausbildungsvorrichtung, Filmausbildungsverfahren und Verfahren zur Herstellung eines Artikels

Details

Veröffentlichungs-Nr.

EP3637456

Aktenzeichen

EP19200694

Anmeldetag

1. Oktober 2019

Veröffentlichung

20. März 2024

Erteilung

20. März 2024

Rechtsraum

EP

IPC

H01L21/3105H01L21/67H01L21/687G03F7/09

Abstract

A film forming apparatus for forming a film on a substrate includes a driver configured to bring a curable composition arranged on the substrate and a flat surface into contact with each other, a heater configured to heat the curable composition by electromagnetic waves to reduce the viscosity of the curable composition and make the curable composition conform to the flat surface, and a curing device configured to form a film made of a cured product of the curable composition by curing the curable composition in a state in which the curable composition conforms to the flat surface.

Anmelder

Firma

CANON KABUSHIKI KAISHA

Land

🇯🇵 Japan

Fachgebiete