Induktive Positionsdetektionsanordnung zur Anzeige der Taststiftposition einer Messvorrichtung

Details

Veröffentlichungs-Nr.

EP3647713

Aktenzeichen

EP19206283

Anmeldetag

30. Oktober 2019

Veröffentlichung

1. Dezember 2021

Erteilung

1. Dezember 2021

Rechtsraum

EP

IPC

G01B5/016G01B7/016

Abstract

An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe with a motion volume extending on opposite sides of the coil board configuration. The coil board configuration includes N top rotary sensing coils (RSCs) and a top axial sensing coil configuration (ASCC), and N bottom RSCs and a bottom ASCC. A pair of stylus-coupled conductive disruptors move along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) of the coil board configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the disruptors), and coil signals indicate the disruptors and/or stylus positions. Areas of the conductive disruptors may be larger than an area of the generating coil in some implementations, and the conductive disruptors may each comprise a plurality of concentric conductive loops, spirals, etc.

Anmelder

Firma

Mitutoyo Corporation

Land

🇯🇵 Japan

Fachgebiete