Mems Beschleunigungssensor mit Antireflexions- und Reflektionsbeschichtungen

Details

Veröffentlichungs-Nr.

EP3647795

Aktenzeichen

EP19191588

Anmeldetag

13. August 2019

Veröffentlichung

14. Juli 2021

Erteilung

14. Juli 2021

Rechtsraum

EP

IPC

G01P15/093G01D5/28G01P15/097G01P15/18B81B5/00

Abstract

An accelerometer includes a membrane; a laser source, the laser source producing a laser beam, the laser beam directed at the membrane causing the membrane to vibrate; a transparent cap, the transparent cap disposed between the laser source and the membrane; an antireflecting film disposed on an outer surface of the transparent cap; and a detector sensing a reflected portion of the laser beam, the reflected portion including a modulated intensity. An acceleration signal is based in part on the frequency of the modulated intensity of the reflected portion of the laser beam.

Anmelder

Firma

General Electric Company

Land

🇺🇸 USA

Fachgebiete