Montagetisch und Verfahren zur Herstellung des Montagetisches

Details

Veröffentlichungs-Nr.

EP3671819

Aktenzeichen

EP19216660

Anmeldetag

16. Dezember 2019

Veröffentlichung

6. Juli 2022

Erteilung

6. Juli 2022

Rechtsraum

EP

IPC

H01L21/67G01R31/28H01L21/687// H01L21/683

Abstract

There is provided a mounting table (10) on which a workpiece (W) is mounted, including: a plurality of layers including a ceiling layer (110) having a front surface on which the workpiece (W) is mounted, and a heating layer (130) formed at a rear surface side of the ceiling layer (110) and configured to heat the ceiling layer (110), the plurality of layers being stacked above one another. Each of the plurality of layers is formed by a silicon single crystal substrate or a silicon polycrystalline substrate. Each of the plurality of layers is bonded to a different layer which is adjacent in a stacking direction through oxide films (111, 121, 122, 131, 132, 141, 142, 152) formed on the silicon single crystal substrate or the silicon polycrystalline substrate.

Anmelder

Firma

Tokyo Electron Limited

Land

🇯🇵 Japan

Fachgebiete