Plasmapolymerisierungsverfahren zur Beschichtung eines Substrats mit einem Polymer

Details

Veröffentlichungs-Nr.

EP3680029

Aktenzeichen

EP19151022

Anmeldetag

9. Januar 2019

Veröffentlichung

7. Juni 2023

Erteilung

7. Juni 2023

Rechtsraum

EP

IPC

B05D3/14B05D5/08B05D7/00B05D1/00

Abstract

A plasma polymerisation method for coating a substrate with a polymer layer, which method includes:providing a substrate to be coated within a plasma chamber;introducing a flow of a first polymer precursor to the plasma chamber;applying a power at a level greater than zero Watts (W) and converting the first polymer precursor to a first polymer precursor plasma;exposing the substrate to the first polymer precursor plasma;introducing a flow of a second polymer precursor to the plasma chamber;applying a power at a level greater than zero Watts (W) and converting the second polymer precursor to a second polymer precursor plasma; andexposing the substrate to the second polymer precursor plasma,wherein exposing the substrate to the first polymer precursor plasma forms a first polymer layer thereon and exposing the substrate to the second polymer precursor plasma forms a second polymer layer thereon, characterised by maintaining the power at a level greater than zero Watts (W) between exposing the substrate to the first polymer precursor plasma and exposing the substrate to the second polymer precursor plasma.

Anmelder

Firmen

Europlasma NV
Europlasma nv

Land

🇧🇪 Belgien

Fachgebiete