Transportvorrichtung und Verfahren zum Transportieren einer Probe zwischen Zwei Vorrichtungen sowie System zur Probenhandhabung

Details

Veröffentlichungs-Nr.

EP3699953

Aktenzeichen

EP19158552

Anmeldetag

21. Februar 2019

Veröffentlichung

21. August 2024

Erteilung

21. August 2024

Rechtsraum

EP

IPC

H01L21/677H01J37/18

Abstract

The invention relates to a transport apparatus for transferring a sample between two devices, for example for transferring an electron microscope (EM) sample. The transport apparatus comprises a transport tube provided with a carrier for holding a sample. The carrier is movable within said transport tube along a length thereof. The transport apparatus further comprises an actuator tube extending substantially next to said transport tube. The actuator tube is provided with an actuator element that is movable within said actuator tube. As disclosed herein, said actuator element comprises a first magnet part, and said sample carrier is provided with a second magnet part, wherein said first magnet part and said second magnet part are provided in such a way that movement of the sample carrier through said transport tube is linked to movement of the magnetic actuator element through the actuator tube. This way, movement of the magnetic actuator causes movement of the sample carrier, allowing safe, reliable and protected transport of the sample between two devices.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete