Sägebügel mit Sollbruchstelle für Integrierten Schaltkreis

Details

Veröffentlichungs-Nr.

EP3754694

Aktenzeichen

EP20179474

Anmeldetag

11. Juni 2020

Veröffentlichung

15. Dezember 2021

Erteilung

15. Dezember 2021

Rechtsraum

EP

IPC

H01L21/66H01L23/58

Abstract

A saw bow is provided and designed such that the conductors of the saw bow will break at a predictable location when using modern dicing techniques. This results in a break in the circuit provided by the saw bow, with any exposed conductors not being on the die side. Further, by providing a known breaking point in the saw bow, modern dicing techniques such as plasma dicing can be used, thereby allowing for the saw lane to be made narrower, which will in turn increase the number of wafers that can be included on a wafer.

Anmelder

Firma

NXP B.V.

Land

🇳🇱 Niederlande

Fachgebiete