System zum Fördern eines Substrats zwischen Verarbeitungsstationen einer Verarbeitungsvorrichtung, Verarbeitungsvorrichtung und Verfahren zur Handhabung eines Substrats

Details

Veröffentlichungs-Nr.

EP3761348

Aktenzeichen

EP19184721

Anmeldetag

5. Juli 2019

Veröffentlichung

27. März 2024

Erteilung

27. März 2024

Rechtsraum

EP

IPC

H01L21/67H01L21/677

Abstract

A system for conveying an object comprising at least a substrate (3) between processing stations (1a,b,2) of a processing apparatus comprises a transporter (4), arranged for movement from processing station to processing station (1a,b,2). The transporter (4) comprises a support part (5) and a holding component (19) for releasably holding the object. The system comprises at least one object movement device (34a-d,43a,b) for moving the object along a path predominantly directed in parallel to a reference axis (z) in a reference co-ordinate system. Each object movement device (34a-d,43a,b) is associated with a respective processing station (1a,b,2) and capable of moving the object along the path towards the transporter (4) to a transfer position and towards the associated processing station (1a,b,2) from the transfer position. The holding component (19) is configured to release and engage the object in the transfer position when the transporter (4) is positioned at the processing station (1a,b,2). The transporter (4) includes at least one actuator (25a,b,26a,b,27a,b) for moving the holding component (19) relative to the support part (5) along a holding component path predominantly directed in parallel to the reference axis (z).

Anmelder

Firmen

Atotech Deutschland GmbH & Co. KG
Atotech Deutschland GmbH

Land

🇩🇪 Deutschland

Fachgebiete