Mikrostruktur und Verfahren zur Herstellung einer Mikrostruktur

Details

Veröffentlichungs-Nr.

EP3793213

Aktenzeichen

EP19197364

Anmeldetag

13. September 2019

Veröffentlichung

7. Mai 2025

Erteilung

7. Mai 2025

Rechtsraum

EP

IPC

H04R7/02B81C1/00

Abstract

A microstructure (1) for use in a micro electro-mechanical device comprises a substrate (2) having a top surface (3) and a rear surface (4) and a thin-film structure (5) arranged at the top surface (3) of the substrate (2). The thin-film structure (5) comprises a raised portion (8) spaced from the substrate (2), a lower portion (6) of the thin-film structure (5), which is in mechanical contact with the substrate (2), at least one protruding portion (9), the protruding portion being hollow and having at least one sidewall (10) and a bottom part (11) and the protruding portion mechanically connecting the raised portion (8) to the substrate (2) via the bottom part (11), and at least one further sidewall (7) of the thin-film structure (5) at a distance to the at least one protruding portion (9), wherein the further sidewall (7) mechanically connects the lower portion (6) with the raised portion (8) of the thin-film structure (5).

Anmelder

Firma

ams International AG

Land

🇨🇭 Schweiz

Fachgebiete