Membranstruktur, Wandlervorrichtung und Verfahren zur Herstellung einer Membranstruktur

Details

Veröffentlichungs-Nr.

EP3793216

Aktenzeichen

EP19197358

Anmeldetag

13. September 2019

Veröffentlichung

6. Dezember 2023

Erteilung

6. Dezember 2023

Rechtsraum

EP

IPC

H04R23/00// H04R19/00B81B3/00

Abstract

A membrane structure (1) comprises a substrate (2) having a main surface (4) and a rear surface (24). A plurality of pillars (10) are arranged on the main surface (4) of the substrate (2) and have a support area (12) facing away from the main surface (4) of the substrate (2). A thin-film structure (6) is arranged above the main surface (4) of the substrate (2) and the pillars (10), wherein the thin-film structure (6) comprises a plurality of raised portions (15) that are spaced further from the substrate (2) than at least one lower portion (16) of the thin film structure. The raised portions (15) each comprise at least one protruding portion (13), the protruding portions (13) being hollow and having a bottom part (14) and a sidewall (22) and the protruding portions (13) extending towards the substrate (2). The bottom part (14) of each protruding portion (13) is mechanically connected to the support area (12) of one of the pillars (10), respectively. A back-volume (5) is formed by the volume between the main surface (4) of the substrate (2) and the thin-film structure (6).

Anmelder

Firma

ams International AG

Land

🇨🇭 Schweiz

Fachgebiete