Herstellungsverfahren für Mehrpixel-Gasmikrosensoren mit Mehrfacherfassungsfähigkeiten

Details

Veröffentlichungs-Nr.

EP3795986

Aktenzeichen

EP19198415

Anmeldetag

19. September 2019

Veröffentlichung

7. Juni 2023

Erteilung

7. Juni 2023

Rechtsraum

EP

IPC

G01N27/12

Abstract

The present invention relates to a method for manufacturing multi-pixel gas microsensors, wherein each multi-pixel gas microsensor comprises at least a first pixel group having a first sensing material and a second pixel group having a second sensing material different from the first material. The method comprises a first step of providing a wafer substrate and processing the wafer substrate for building a plurality of multi-pixel microsensors having first and second groups of pixels, a second step of selecting sensing materials for each of the groups of pixels, and a third step of activation of the first and the second pixel group by coating electrode pairs of the first and second pixel group with the corresponding sensing materials selected.

Anmelder

Firma

Université catholique de Louvain

Land

🇧🇪 Belgien

Fachgebiete