Beleuchtungsvorrichtung, Abbildungsvorrichtung und System

Details

Veröffentlichungs-Nr.

EP3839483

Aktenzeichen

EP19218212

Anmeldetag

19. Dezember 2019

Veröffentlichung

26. Juli 2023

Erteilung

26. Juli 2023

Rechtsraum

EP

IPC

G01N21/64G02B21/06

Abstract

An illuminator (101), comprising:an illumination waveguide (200), and a controller (300);the illumination waveguide (200) being a planar waveguide configured to receive a light wave at a receiving end (202) and guide it to a mirror end (204);the mirror end (204) comprising a patterned mirror (210) configured to reflect at least part of the light wave back into the illumination waveguide (200), the patterned mirror (210) comprising a pattern (211) configured to confer a diffraction pattern to the reflected light, the diffraction pattern contributing to an interference pattern (104), the interference pattern (104) having an evanescent field outside the illumination waveguide (200), wherein the evanescent field of the interference pattern (104) is configured to illuminate an object in close relation to the illumination waveguide (200);wherein the controller (300) is configured to control a wavefront (330) of the received light wave and to set a relation between the controlled wavefront (330) and the pattern (211) of the patterned mirror (210) such that the interference pattern (104) forms at least one element (106) of constructive interference for selectively illuminating a portion of the object;wherein the controller (300) is further configured to sequentially change the interference pattern.

Anmelder

Firma

Imec VZW

Land

🇧🇪 Belgien

Fachgebiete