Resonanzdrucksensor

Details

Veröffentlichungs-Nr.

EP3848685

Aktenzeichen

EP21150413

Anmeldetag

6. Januar 2021

Veröffentlichung

8. März 2023

Erteilung

8. März 2023

Rechtsraum

EP

IPC

G01L9/00B81B3/00H03H9/24

Abstract

A resonant pressure sensor (1A; 1B) includes: a housing (50); a housing-fixed portion (2) fixed to the housing; a substrate (3; 3A; 3B; 3C) including a substrate-fixed portion (31) fixed to the housing-fixed portion (2) and a substrate-separated portion (32; 32A; 32B; 32C)) separated from the housing-fixed portion (2) and extending from the substrate-fixed portion (31); a first resonator (4) disposed in the substrate-separated portion (32; 32A; 32B; 32C) and configured to detect a change of a resonance frequency based on a strain in the substrate (3; 3A; 3B; 3C) caused by static pressure applied by a pressure-receiving fluid (F; K); and a processor (1). The pressure-receiving fluid (F: K) is intended to be interposed in a gap defined between the housing-fixed portion (2) and the substrate (3; 3A; 3B; 3C) and envelop the substrate (3; 3A; 3B; 3C). The processor (1) is configured to measure the static pressure based on the detected change of the resonance frequency.

Anmelder

Firma

YOKOGAWA ELECTRIC CORPORATION

Land

🇯🇵 Japan

Fachgebiete