Magnetoresistives Sensorelement zur Erfassung eines Zweidimensionalen Magnetfeldes mit Geringem Hochfeldfehler

Details

Veröffentlichungs-Nr.

EP3879543

Aktenzeichen

EP20315038

Anmeldetag

11. März 2020

Veröffentlichung

27. November 2024

Erteilung

27. November 2024

Rechtsraum

EP

IPC

H01F10/32G01R33/09H10N50/10H10N50/85H10N50/01

Abstract

A magnetoresistive element (2) for a two-dimensional magnetic field sensor, comprising: a ferromagnetic reference layer (21) having a fixed reference magnetization (210), a ferromagnetic sense layer (23) having a sense magnetization (230) that can be freely oriented relative to the reference magnetization (210) in the presence of an external magnetic field, and a tunnel barrier layer (22) between the reference and sense ferromagnetic layers (21, 23); the reference layer (21) comprising a reference coupling layer (213) between a reference pinned layer (211) and a reference coupled layer (212); the reference coupled layer (212) comprising a first coupled sublayer (214) in contact with the reference coupling layer (213), a second coupled sublayer (215), a third coupled sublayer (217) and a insert layer (216) between the second and third coupled sublayers (215, 217); the insert layer (216) comprising a transition metal and has a thickness between about 0.1 and about 0.5 nm, and the thickness of the reference coupled layer (212) is between about 1 nm and about 5 nm.

Anmelder

Firmen

Allegro MicroSystems, LLC
Crocus Technology SA
Crocus Technology S.A.

Land

🇺🇸 USA

Fachgebiete