Kontrollierte Abscheidung eines Funktionellen Materials auf eine Zieloberfläche

Details

Veröffentlichungs-Nr.

EP3889319

Aktenzeichen

EP20167549

Anmeldetag

1. April 2020

Veröffentlichung

17. November 2021

Rechtsraum

EP

IPC

C23C26/00C23C26/02C23C28/00C23C28/04C03C17/34H01L33/44H01L33/46

Abstract

A plate (1) is provided herein, comprising functional material (2) to be deposited onto a target surface (51) using monochromatic photon radiation (R3) having a wavelength (λ_R3). The plate comprises a substrate (10) with a first surface (11) to be directed towards the target surface and with a second surface (12) to receive the monochromatic photon radiation. The first surface (11) is patterned with one or more recessed areas (111) that have a dielectric coating (4) and that are filled with the functional material. The dielectric coating (4) comprises a sequence of dielectric coating layers (41, 42, 43) alternating in refractive index. The dielectric coating (4) therewith has a relatively high reflectivity for said monochromatic radiation (R3) incident perpendicular to the dielectric coating (4) in comparison to a reflectivity for said monochromatic radiation (R3) incident at an angle of 45 degrees to the dielectric coating (4). Therewith shear forces are mitigated without requiring a high alignment accuracy.The present application further provides a deposition device comprising the plate and a method involving the plate.

Anmelder

Firma

Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO

Land

🇳🇱 Niederlande

Fachgebiete