Induktive Positionsdetektionsanordnung zur Anzeige der Taststiftposition einer Messvorrichtung

Details

Veröffentlichungs-Nr.

EP4019889

Aktenzeichen

EP21216121

Anmeldetag

20. Dezember 2021

Veröffentlichung

1. Mai 2024

Erteilung

1. Mai 2024

Rechtsraum

EP

IPC

G01B7/012

Abstract

An inductive position detection configuration for stylus position measurement in a scanning probe comprises a stylus position detection portion arranged along a central axis in the probe. The stylus position detection portion includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. A field generating coil coupling and crosstalk reducing configuration couples signal processing and control circuitry to the field generating coil configuration to provide a coil drive signal, and is configured to reduce crosstalk that would otherwise occur if the field generating coil configuration were directly connected to the signal processing and control circuitry without the field generating coil coupling and crosstalk reducing configuration.

Anmelder

Firma

Mitutoyo Corporation

Land

🇯🇵 Japan

Fachgebiete