Abbildungssystem und Verfahren zur Abbildung einer Probe

Details

Veröffentlichungs-Nr.

EP4116777

Aktenzeichen

EP21183899

Anmeldetag

6. Juli 2021

Veröffentlichung

11. Januar 2023

Rechtsraum

EP

IPC

G03H1/02G03H1/04G03H1/00G03H1/08// G02B5/28

Abstract

According to an aspect of the present inventive concept there is provided an imaging system (1a, 1 b, 1c, 1d) for imaging of a sample (4), comprising (1a, 1b, 1c, 1d) a light source (2, 2d), an interference filter (8a, 8b, 8c, 8d) and a detector (9), the light source (2, 2d) generates illumination light of a single wavelength (3, 3c, 3d, 3e) to induce elastic scattering of the light (3, 3c, 3d, 3e) by the sample (4), the interference filter (8a, 8b, 8c, 8d) selectively reduces transmittance of light having an incident angle (θa, θb) on the interference filter (8a, 8b, 8c, 8d) corresponding to non-scattered light (7, 7c, 7d, 7e), the detector (9) is configured to detect a two-dimensional representation (10) of the elastically scattered light (6, 6c, 6d, 65) transmitted by the interference filter (8a, 8b, 8c, 8d).

Anmelder

Firma

Imec VZW

Land

🇧🇪 Belgien

Fachgebiete