Schwingungsisolator zum Unterstützen einer Nutzlast

Details

Veröffentlichungs-Nr.

EP4151880

Aktenzeichen

EP21197474

Anmeldetag

17. September 2021

Veröffentlichung

29. Oktober 2025

Erteilung

29. Oktober 2025

Rechtsraum

EP

IPC

F16F9/04

Abstract

A vibration isolator (10) for supporting a payload and isolating the payload from vibrations comprises: a pressurized gas compartment (24) formed with a rigid base structure (28), which base structure has an opening (32) covered with a flexible membrane (20) having an inner surface (21) facing into the gas compartment and an outer surface (22) facing in the opposite direction, a support member (12) for supporting the payload, which support member is arranged in contact with the outer surface (22) of the membrane, and a clamping member (62) arranged at the inner surface (21) of the membrane, wherein the support member and the clamping member form a clamping system (66), which system comprises at least one magnetic element (64) effecting the membrane to be pressed against the support member.

Anmelder

Firmen

Carl Zeiss SMT GmbH
ASML Netherlands B.V.

Land

🇩🇪 Deutschland

Fachgebiete