Piezoelektrisches Laminat und Piezoelektrisches Element

Details

Veröffentlichungs-Nr.

EP4156890

Aktenzeichen

EP22191046

Anmeldetag

18. August 2022

Veröffentlichung

6. November 2024

Erteilung

6. November 2024

Rechtsraum

EP

IPC

H10N30/87H10N30/85H10N30/853H10N30/00

Abstract

An object of the present disclosure is to obtain a piezoelectric laminate and a piezoelectric element, having improved piezoelectric characteristics and drive stability without increasing a process load.A piezoelectric laminate and a piezoelectric element have, on a substrate in the following order, a lower electrode layer, and a piezoelectric film containing a perovskite-type oxide. The lower electrode layer includes a first layer arranged in a state of being in contact with the substrate and includes a second layer arranged in a state of being in contact with the piezoelectric film, the first layer contains Ti or TiW as a main component, the second layer is a uniaxial alignment film which contains Ir as a main component and in which the Ir is aligned in a (111) plane, and a half width at half maximum of an X-ray diffraction peak from the (111) plane is 0.3° or more.

Anmelder

Firma

FUJIFILM Corporation

Land

🇯🇵 Japan

Fachgebiete