Inspektionssystem und Speichermedium

Details

Veröffentlichungs-Nr.

EP4163623

Aktenzeichen

EP22199097

Anmeldetag

30. September 2022

Veröffentlichung

16. Juli 2025

Erteilung

16. Juli 2025

Rechtsraum

EP

IPC

G01N21/3581// G01N21/3586

Abstract

In an inspection system (100) that uses terahertz waves, in order to improve the inspection precision for objects (150) and the like, the inspection system (100) has an illumination unit (110) having a plurality of illumination elements (111) that radiate terahertz waves; a camera unit (120) that captures images of the terahertz waves that have been reflected off of an object (150) that has been irradiated by the plurality of illumination elements (111); and a control unit (160) that performs control so as to make the light emission timings for the plurality of illumination elements (111) different.

Anmelder

Firma

Canon Kabushiki Kaisha

Land

🇯🇵 Japan

Fachgebiete