Abbildungsvorrichtung und Verfahren zur Holographischen Abbildung von Proben

Details

Veröffentlichungs-Nr.

EP4191344

Aktenzeichen

EP21212526

Anmeldetag

6. Dezember 2021

Veröffentlichung

28. Januar 2026

Erteilung

28. Januar 2026

Rechtsraum

EP

IPC

G03H1/04

Abstract

According to an aspect of the present inventive concept there is provided an imaging device for holographic imaging of a sample, the imaging device comprising a light source generating a light beam, a beam splitter splitting the light beam into an object beam along an object beam path and a reference beam along a reference beam path, and a detector.The imaging device defines a sample position.The object beam is propagated through the sample position, and the detector is arranged to prevent non-scattered object light, passing through the sample position without being scattered by the sample, from being incident onto the detector.The reference beam is propagated through the sample position, and the detector is arranged so that non-scattered reference light, passing through the sample position without being scattered by the sample, is incident onto the detector.The detector detects an interference pattern formed by scattered object light, scattered by the sample, and the non-scattered reference light.

Anmelder

Firma

Imec VZW

Land

🇧🇪 Belgien

Fachgebiete