Optische Abtastvorrichtung und Steuerungsverfahren dafür

Details

Veröffentlichungs-Nr.

EP4209823

Aktenzeichen

EP23150249

Anmeldetag

4. Januar 2023

Veröffentlichung

12. Juli 2023

Rechtsraum

EP

IPC

G02B26/08G02B26/10

Abstract

To provide an optical scanning device and a control method thereof capable of reducing variation in a line spacing of a spiral orbit.A resonance mode of one lower order than a basic resonance mode closest to a frequency of a cyclic voltage signal exists in at least any one of a plurality of resonance modes accompanied by a mirror tilt swing around a first axis or a plurality of resonance modes accompanied by the mirror tilt swing around a second axis. In a case where a resonance frequency of one higher order from a frequency of the basic resonance mode is f_rH, a ratio of a first voltage level to a second voltage level which is a maximum voltage level value in the entire frequency range among frequency components of the cyclic voltage signal is satisfied to be -55 dBV or less, where a maximum voltage level value in a frequency range of (1 ± 1/20) × f_rL and a frequency range of (1 ± 1/20) × f_rH among the frequency components of the cyclic voltage signal is the first voltage level for an axis in which the lower-order resonance mode exists among the first axis and the second axis, and a maximum voltage level value in the frequency range of (1 ± 1/20) × f_rH among the frequency components of the cyclic voltage signal is the first voltage level for an axis in which the lower-order resonance mode does not exist among the axes.

Anmelder

Firma

FUJIFILM Corporation

Land

🇯🇵 Japan

Fachgebiete