Lichtsensor und Verfahren zur Herstellung eines Lichtsensors

Details

Veröffentlichungs-Nr.

EP4279885

Aktenzeichen

EP22173916

Anmeldetag

17. Mai 2022

Veröffentlichung

4. März 2026

Erteilung

4. März 2026

Rechtsraum

EP

IPC

G01J3/02G01J3/26G01J3/28G01J3/36H04N5/33H10F77/40

Abstract

A light sensor (100) for spectrally resolved light detection, said light sensor (100) comprises: an upper reflective element (104); a lower reflective element (106); a photo-sensitive element (114) therebetween; a spacer element (108), configured to form the lower reflective element (106) or configured to be arranged between the upper (104) and the lower reflective element (106); wherein the elements form a stack of layers which define a resonance structure (102a, 102b, 102c) between the upper (104) and the lower reflective element (106) for providing a resonance of light; wherein the spacer element (108) comprises at least two different materials (110, 112), a distribution of which is different between different pixels in an array of pixels such that a resonance wavelength is different for different pixels; and wherein for a plurality of pixels, geometrical structures smaller than the resonance wavelength are defined by the at least two different materials (110, 112).

Anmelder

Firmen

Imec VZW
Katholieke Universiteit Leuven KU Leuven Research & Development

Land

🇧🇪 Belgien

Fachgebiete