Rohmaterialzufuhrvorrichtung und Lichtquellenvorrichtung

Details

Veröffentlichungs-Nr.

EP4362610

Aktenzeichen

EP23205511

Anmeldetag

24. Oktober 2023

Veröffentlichung

31. Dezember 2025

Erteilung

31. Dezember 2025

Rechtsraum

EP

IPC

H05G2/00F16L55/103

Abstract

A raw material supply device according to an embodiment of the present invention is a raw material supply device that supplies, to an inside of a reduced-pressure chamber, a plasma raw material that is transformed into plasma to generate radiation when irradiated with an energy beam, including a raw material tank; and a supply controller. The raw material tank holds the plasma raw material in a liquid state. The supply controller includes a supply pipe that connects the raw material tank and the reduced-pressure chamber to each other and supplies the liquid plasma raw material held inside the raw material tank to a storage container provided inside the reduced-pressure chamber, and controls supply of the liquid plasma raw material through the supply pipe.

Anmelder

Firma

Ushio Denki Kabushiki Kaisha

Land

🇯🇵 Japan

Fachgebiete