Magnetsensor mit Niedriger Hysterese

Details

Veröffentlichungs-Nr.

EP4369015

Aktenzeichen

EP22315285

Anmeldetag

14. November 2022

Veröffentlichung

15. Mai 2024

Rechtsraum

EP

IPC

G01R33/09G01R33/00

Abstract

The present disclosure concerns a magnetic sensor (100) for sensing an external magnetic field, comprising a plurality of magnetoresistive sensor elements (10), each comprising a reference layer (21) having a reference magnetization (210), a sense layer (23) having a sense magnetization (230) comprising a stable vortex configuration, and a tunnel barrier layer (22). In a layer plane (P<L>) of the layers (21, 22, 23), each magnetoresistive sensor element (10) has a regular polygon shape comprising n vertices and has a lateral size (D) in the layer plane (P<L>) between 0.2 µm and 5 µm. Each magnetoresistive sensor element (10) has an aspect ratio of its lateral size (D) to its thickness (tt) between 0.005 µm and 2 µm. Each magnetoresistive sensor element (10) is rotated in the layer plane (P<L>) by 360°/2n relative to an adjacent magnetic sensor element (10). Alternatively, the reference magnetization (210) of each magnetoresistive sensor elements (10) is rotated by 360°/2n in the layer plane (P<L>) relative to the reference magnetization (210) of an adjacent magnetoresistive sensor element (10).

Anmelder

Firma

Allegro MicroSystems, LLC

Land

🇺🇸 USA

Fachgebiete