Verfahren und Vorrichtung zur Überwachung eines Überwachungsmaterials eines Prozesses

Details

Veröffentlichungs-Nr.

EP4371665

Aktenzeichen

EP22208101

Anmeldetag

17. November 2022

Veröffentlichung

11. März 2026

Erteilung

11. März 2026

Rechtsraum

EP

IPC

B01L3/00G01N15/14

Abstract

A method for monitoring a monitor material of a process, such as a manufacturing process, comprises: detecting (204) a suspicious particle (122) in a sample of the monitor material using an imaging system (114) configured to image the sample using illumination light from a light source (116) and to detect an interference pattern based on object light having interacted with the sample and reference light of the illumination light; selectively diverting (208) the suspicious particle (122) from a flow of the sample to an analysis flow; activating (210) a nucleic acid test (NAT) device (160), wherein said activating is triggered based on detecting of the suspicious particle (122) in the sample; receiving (214) by the NAT device (160) the analysis flow comprising the suspicious particle (122); and subjecting (220) the suspicious particle (122) to a NAT analysis.Also, an apparatus for monitoring a monitor material is provided.

Anmelder

Firma

Imec VZW

Land

🇧🇪 Belgien

Fachgebiete