Metallblech, Untersuchungsverfahren für ein Metallblech, Herstellungsverfahren für ein Metallblech, Maske, Maskenvorrichtung und Herstellungsverfahren für eine Maske

Details

Veröffentlichungs-Nr.

EP4451058

Aktenzeichen

EP24170991

Anmeldetag

18. April 2024

Veröffentlichung

20. November 2024

Rechtsraum

EP

IPC

G03F1/50G03F1/84C23C14/04

Abstract

A surface of a metal plate used for manufacturing a mask may have a first reflectance, a second reflectance, a third reflectance, and a fourth reflectance. The first reflectance is the reflectance of first reflected light having a first output angle. The third reflectance is the reflectance of the first reflected light having a third output angle. The first output angle is an output angle at which the first reflected light indicates a maximum intensity. The third output angle is an output angle different from the first output angle by a first deviation angle. The second reflectance is the reflectance of second reflected light having a second output angle. The fourth reflectance is the reflectance of the second reflected light having a fourth output angle. The second output angle is an output angle at which the second reflected light indicates a maximum intensity. The fourth output angle is an output angle different from the second output angle by a second deviation angle. A first ratio as a ratio of the third reflectance to the first reflectance may be 0.40 or lower. A second ratio as a ratio of the fourth reflectance to the second reflectance may be 0.40 or lower.

Anmelder

Firma

Dai Nippon Printing Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete