Filmabscheidungsverfahren, Verfahren zur Herstellung einer Vorrichtung und Filmabscheidungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4502730

Aktenzeichen

EP24191265

Anmeldetag

26. Juli 2024

Veröffentlichung

5. Februar 2025

Rechtsraum

EP

IPC

G03F7/16G06N10/40H01L21/67H10N60/01

Abstract

A film deposition method of the present invention includes: a first step of installing a substrate (100) on a turntable (102) of a spin coating device such that a first main surface (100a) faces the turntable, and adding a first liquid having viscosity dropwise onto a second main surface (100b) of the substrate; a second step of holding the substrate in the same state until the first liquid added dropwise reaches the first main surface (100a) side from the second main surface (100b) side through a through-hole (101); a third step of rotating the substrate (100) together with the turntable (102); and a fourth step of heating the first liquid together with the substrate (100).

Anmelder

Firma

RIKEN

Land

🇯🇵 Japan

Fachgebiete