Sensor, Sensorsystem und Elektronische Vorrichtung

Details

Veröffentlichungs-Nr.

EP4516723

Aktenzeichen

EP24178198

Anmeldetag

27. Mai 2024

Veröffentlichung

31. Dezember 2025

Erteilung

31. Dezember 2025

Rechtsraum

EP

IPC

B81B3/00G01C19/5677G01C19/5684

Abstract

According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, a movable portion supported by the fixed portion, a first fixed electrode, and a first opposing fixed electrode. The fixed portion includes a first center in a first plane parallel to the first face. The movable portion includes first and second annular portions. The first fixed electrode includes first and second regions. The first opposing fixed electrode includes first and second opposing regions. The first region is provided between the second annular portion and the first annular portion. The first opposing region is provided between the second annular portion and the first region. The second region is provided between the second annular portion and the first annular portion. The second opposing region is provided between the second annular portion and the second region.

Anmelder

Firmen

KABUSHIKI KAISHA TOSHIBA
Kabushiki Kaisha Toshiba

Land

🇯🇵 Japan

Fachgebiete