Kraftmessvorrichtung und Verfahren zur Herstellung einer Kraftmessvorrichtung

Details

Veröffentlichungs-Nr.

EP4607167

Aktenzeichen

EP24159632

Anmeldetag

26. Februar 2024

Veröffentlichung

27. August 2025

Rechtsraum

EP

IPC

G01L1/14

Abstract

A force sensing device (100) comprises: a flexible substrate (102); a sensor unit (112) arranged thereon comprising: at least one first electrode (114a-d) in a first layer (116); at least one second electrode (120) in a second layer (122); wherein a plurality of first electrodes (114a-d) and/or second electrodes is provided; an intermediate structure (130) between the first and second electrodes for changing characteristics upon a force being received; trench(es) (140) in the second layer (122) partially surrounding the second electrode(s) (120), wherein bridging structure(s) (142) provides an anchoring position defining a fixed relation between the first and second layers (116; 122); a rigid projecting structure (150) projecting from the second layer (122) and connected to the second electrode(s) (120), wherein the rigid projecting structure (150) is embedded in an elastic material (152) for allowing the rigid projecting structure (150) to be tilted in relation to the first layer (116).

Anmelder

Firmen

Imec VZW
Katholieke Universiteit Leuven KU Leuven Research & Development

Land

🇧🇪 Belgien

Fachgebiete