Planarisierungsvorrichtung und Artikelherstellungsverfahren
Anmelder: CANON KABUSHIKI KAISHA 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP4632485
- Aktenzeichen
- EP25165943
- Anmeldetag
- 25. März 2025
- Veröffentlichung
- 5. November 2025
- Rechtsraum
- EP
- IPC
- G03F7/00H01L21/67H01L21/677
Abstract
A planarization apparatus includes a plurality of processors including first and second processors and configured to perform a planarization process of a substrate in each of the processors. The first processor is arranged within a conveyance range of one of the substrate and the flat member by a first conveyance robot arranged on the conveyance path between a loading unit and an adjuster and configured to convey one of the substrate and the flat member. The second processor is arranged within a conveyance range of one of the substrate and the flat member by a second conveyance robot arranged on the conveyance path between the adjuster and the supplier and configured to convey one of the substrate and the flat member.
Anmelder
- Firma
- CANON KABUSHIKI KAISHA
- Land
- 🇯🇵 Japan
Japanischer Konzern mit Sitz in Tokio, der Kameras, Objektive, Drucker, Kopiergeräte sowie optische und medizinische Bildgebungstechnik entwickelt und herstellt.
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