Optischer Verstärker zur Verstärkung von Laserstrahlung, Lithographiesystem und Verfahren zur Verstärkung von Laserstrahlung in einem Optischen Verstärker

Details

Veröffentlichungs-Nr.

EP4632970

Aktenzeichen

EP24169402

Anmeldetag

10. April 2024

Veröffentlichung

15. Oktober 2025

Rechtsraum

EP

IPC

H01S3/00H01S3/034H01S3/03G01N21/94H01S3/036// H01S3/07H01S3/223

Abstract

The present invention concerns an optical amplifier (2) for amplifying laser radiation (11) comprising a cavity (201) filled with a laser active gas, comprising a screen (205) having a surface arranged in the cavity (201), a camera (207) configured for monitoring the surface of the screen (205) and for providing image data, and an analysis unit (208) configured for detecting particles (300) deposited on the surface of the screen (205) based on the image data provided by the camera (207. The invention further concerns a for monitoring particle contamination in an optical amplifier (2) for amplifying laser radiation (11) comprising a cavity (201) filled with a laser active gas and a screen (205) having a surface arranged in the cavity (201), wherein a camera (207) monitors the surface of the screen (205) and provides image data and an analysis unit (208) detects particles (300) deposited on the surface of the screen (205) based on the image data provided by the camera (205).

Anmelder

Firmen

TRUMPF Lasersystems for Semiconductor Manufacturing SE
ASML Netherlands B.V.

Land

🇩🇪 Deutschland

Fachgebiete