Inspektionsvorrichtung und Inspektionsverfahren

Details

Veröffentlichungs-Nr.

EP4711732

Anmeldetag

4. März 2024

Veröffentlichung

28. November 2024

Rechtsraum

EP

Abstract

An inspection apparatus 1 includes a stage 10 configured to hold a PIC 100, a PIC controller 20 configured to control an operation of the PIC 100, an LRG dichroic mirror 61 having a transmission characteristic in which transmittance varies linearly in a predetermined wavelength range and configured to transmit and reflect light guided by a waveguide 108 and output from at least one optical output unit 102 on the basis of the transmission characteristic, a first camera 62 configured to capture the light transmitted through the LRG dichroic mirror 61 to output a transmission image, a second camera 63 configured to capture the light reflected by the LRG dichroic mirror 61 to output a reflection image, and a computer 70 configured to execute a first process for deriving wavelength information about light output from the optical output unit 102 on the basis of the transmission image and the reflection image.

Anmelder

Firma

Hamamatsu Photonics K.K.

Land

🇯🇵 Japan