Inspektionsvorrichtung und Inspektionsverfahren

Details

Veröffentlichungs-Nr.

EP4711733

Anmeldetag

4. März 2024

Veröffentlichung

28. November 2024

Rechtsraum

EP

Abstract

An inspection apparatus 1 includes a stage 10 holding a PIC 100, a PIC controller 20 controlling an operation of the PIC 100, an LRG filter 61 having a transmission characteristic in which a transmittance varies linearly in a predetermined wavelength range and configured to transmit or reflect light that has been guided by a waveguide 108 and output from at least one optical output unit 102 on the basis of the transmission characteristic, a camera 62 capturing light transmitted through the LRG filter 61 to output a transmission image and capturing light, which has arrived without passing through the LRG filter 61, to output a total light quantity image, and a computer 70 performing a first processing to derive wavelength information of the light output from the optical output unit 102 on the basis of the transmission image and the total light quantity image.

Anmelder

Firma

Hamamatsu Photonics K.K.

Land

🇯🇵 Japan