Beschichtung mit Variablem Schichtdickengradienten

Details

Veröffentlichungs-Nr.

EP4715083

Anmeldetag

9. September 2025

Veröffentlichung

25. März 2026

Rechtsraum

EP

IPC

(WANG YOUQI et al.)(XIANG XIAO D et al.)(SPRAGUE ROBERT et al.)

Abstract

A coating device comprising a sample carrier, a source, shadow mask and coating driver. The source comprises a plurality of targets such as a first target and second target. The source is arranged to coat at least one sample housed in the sample carrier. The shadow mask is disposed in a line-of-sight between the sample carrier and source. The shadow mask is arranged such that the first target provides a first coating contribution. The shadow mask is further arranged such that the second target provides a second coating contribution. The second coating contribution is different to the first coating contribution. At least one of the first and second coating contributions is non-uniform in a first dimension of the sample. The coating driver is arranged to independently control the first coating contribution and second coating contribution such that a thickness gradient of the coating in the first direction is variable.

Anmelder

Firma

Envisics Ltd

Land

🇬🇧 Großbritannien